Micromachined Cavity Resonator Sensors for on Chip Material Characterisation in the 220–330 GHz band
نویسندگان
چکیده
A silicon micromachined waveguide on-chip sensor for J-band (220-325 GHz) is presented. The sensor is based on a micromachined cavity resonator provided with an aperture in the top side of a hollow waveguide for sensing purposes. The waveguide is realized by microfabrication in a silicon wafer, gold metallized and assembled by thermocompression bonding. The sensor is used for measuring the complex relative permittivity of different materials. Preliminary measurements of several dielectric materials are performed, demonstrating the potential of the sensor and methodology.
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